The effect of nitrogen flow rate on TiBN coatings deposited on cold work tool steel

ArticleAçık Erişim

Özet

TiBN coatings have high hardness and high adhesion. Due to these excellent properties there has been increasing interest in TiBN coatings. In this study, TiBN coatings were deposited on AISI D2 cold work tool steel and silicon wafers by closed field unbalanced magnetron sputtering (CFUBMS). The structural, mechanical and adhesion properties of these coatings were analysed by X-ray diffraction, scanning electron microscopy, microhardness test, indentation test and scratch tests. TiBN coatings produced by magnetron sputtering exhibited a dense and columnar structure. These results indicate that TiB2, TiN and h-BN exist in crystalline forms at all coatings. The highest hardness was obtained at the lowest nitrogen flow rate. Very few cracks were observed at the edge of the indentation marks at the highest nitrogen flow rate. The highest critical load obtained with scratch test was identified as 102 N. © 2014 © 2014 Taylor & Francis.

Anahtar Kelimeler

RDL Kalıcı Bağlantı (PID)
https://rdlopen.rawdatalibrary.net/r/ebyu/15371Resmi atıflarda kullanılan kalıcı adres
Tam Kayıt
AlanDeğerDil
dc.contributor.authorCicek, Hikmet
dc.contributor.authorBaran, Ozlem
dc.contributor.authorDemirci, Ebru Emine
dc.contributor.authorTahmasebian, Mortaza
dc.contributor.authorTotik, Yasar
dc.contributor.authorEfeoglu, Ihsan
dc.date.accessioned2026-10-18T20:30:11.429675834Z
dc.date.available2026-10-18T20:30:11.429675834Z
dc.date.issued2014
dc.description.abstractTiBN coatings have high hardness and high adhesion. Due to these excellent properties there has been increasing interest in TiBN coatings. In this study, TiBN coatings were deposited on AISI D2 cold work tool steel and silicon wafers by closed field unbalanced magnetron sputtering (CFUBMS). The structural, mechanical and adhesion properties of these coatings were analysed by X-ray diffraction, scanning electron microscopy, microhardness test, indentation test and scratch tests. TiBN coatings produced by magnetron sputtering exhibited a dense and columnar structure. These results indicate that TiB2, TiN and h-BN exist in crystalline forms at all coatings. The highest hardness was obtained at the lowest nitrogen flow rate. Very few cracks were observed at the edge of the indentation marks at the highest nitrogen flow rate. The highest critical load obtained with scratch test was identified as 102 N. © 2014 © 2014 Taylor & Francis.
dc.identifier.doi10.1080/01694243.2014.888890
dc.identifier.eissn1568-5616
dc.identifier.endpage1148
dc.identifier.issn0169-4243
dc.identifier.issue12
dc.identifier.scopus2-s2.0-84897108162
dc.identifier.startpage1140
dc.identifier.urihttps://rdlopen.rawdatalibrary.net/r/ebyu/15371
dc.identifier.volume28
dc.identifier.wosWOS:000333880700003
dc.language.isoen
dc.publisherVSP BV
dc.relation.ispartofJournal of Adhesion Science and Technology
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectadhesion
dc.subjectCFUBMS
dc.subjectcritical load
dc.subjectnitrogen
dc.subjectTiBN coatings
dc.subjectBoron nitride
dc.subjectFlow rate
dc.subjectHardness
dc.subjectScanning electron microscopy
dc.subjectSilicon wafers
dc.subjectTool steel
dc.subjectX ray diffraction
dc.subjectAdhesion properties
dc.subjectClosed field unbalanced magnetron sputtering
dc.subjectCold work tool steels
dc.subjectColumnar structures
dc.subjectMicrohardness tests
dc.subjectNitrogen flow rates
dc.subjectCoatings
dc.titleThe effect of nitrogen flow rate on TiBN coatings deposited on cold work tool steel
dc.typeArticle
dspace.entity.typePublication
rdl.citation.scopus13
rdl.citation.wos13
rdl.source.indexSCOPUS
rdl.source.indexWOS
rdl.wos.indexScience Citation Index Expanded (SCI-EXPANDED)